Coulomb interactions in particle beams
by Jansen, Guus
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Description
This book delves into the theory of Coulomb interactions between charged particles, focusing on their effects in low-density particle beams used in electron and ion beam lithography and similar devices. It covers phenomena such as the Coulomb effect, trajectory displacement, space charge defocusing, and various statistical interactions. The book includes detailed discussions on particle optics, particle interactions, the Boersch effect, and Monte Carlo simulations.